Wobo Industrial Equipment Co., Ltd.
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Product Overview
Ultra-high purity electronic-grade CO₂ is a premium industrial gas specifically designed for the electronics, semiconductor, and high-precision manufacturing industries. Sourced from food-grade CO₂, it undergoes cryogenic distillation and physicochemical adsorption to achieve extremely high purity and stable performance. This CO₂ is widely used in laser cutting, reactor gas cooling, medical supercritical extraction, semiconductor oxidation, diffusion, chemical vapor deposition (CVD), and supercritical cleaning applications.
Working Principle
The production process involves cryogenic distillation to remove the majority of impurities, followed by physicochemical adsorption to further purify CO₂, significantly reducing CO, H₂, and other trace contaminants. The process minimizes feedstock loss and maximizes energy efficiency through heat and electricity recovery. The system is highly automated, supporting remote network monitoring, unattended operation, and can be customized based on customer-specific requirements.
Key Features
- Advanced, Proven Technology: Reliable, simple process validated through multiple engineering applications.
- High Purity & Stability: Guarantees consistent electronic-grade CO₂ quality with extremely low impurities.
- High Product Yield: Minimal feedstock loss ensures maximum production efficiency.
- Energy-efficient & Environmentally Friendly: Heat and energy recovery reduce electricity consumption, improving operational economics.
- Automated Control: Supports remote monitoring and unattended operation, enhancing convenience and safety.
- Flexible Customization: Production process and equipment design can be tailored to meet specific industrial requirements.
Applications
- Electronics Industry: Production and processing of electronic components.
- Semiconductor Manufacturing: Oxidation, diffusion, and chemical vapor deposition (CVD) processes.
- Integrated Circuits: Provides stable high-purity CO₂ for chip fabrication.
- LCD & LED Panels: High-purity CO₂ for display panel and light-emitting device manufacturing.
- Photovoltaics: Supports high-purity CO₂ requirements in solar cell and module production.
- Laser Processing: Used as a laser gas in cutting and precision processing.
- Supercritical Cleaning & Extraction: For CO₂-based supercritical cleaning and extraction processes, ensuring product cleanliness.
- Medical Applications: Provides ultra-pure CO₂ for supercritical extraction and specialized medical processes.
