Wobo Industrial Equipment Co., Ltd.
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Product Overview
The Ultra-High Purity CO₂ Gas Analyzer is a high-sensitivity analytical system designed for precise composition analysis of ultra-high purity carbon dioxide. It combines a gas chromatography (GC) system with an auxiliary valve box, enabling accurate detection of trace impurities in CO₂.
The system integrates high-performance detectors, pneumatic switching valves, and a multi-column separation setup to deliver reliable and precise results. With its compact design and stable operation, it is ideal for applications where extremely high gas purity standards are required.
Working Principle
The analyzer operates based on gas chromatography separation principles. The sample gas is directed through a multi-port pneumatic valve system and routed into different analytical columns for separation.
A combination of PLOT Q, PLOT 5A, and PLOT U columns enables efficient separation of multiple gas components. The separated components are then detected using a high-sensitivity PDHID detector, allowing both qualitative and quantitative analysis of trace impurities.
A built-in helium purification system ensures carrier gas purity, reduces background interference, and improves overall measurement accuracy and stability.
Key Features
- High-Sensitivity Detection: Equipped with a PDHID detector, ideal for trace impurity analysis in ultra-high purity CO₂
- Advanced Pneumatic Control: Includes two 10-port valves and two 6-port valves for precise gas flow switching and stable operation
- Helium Purification System: Removes impurities from carrier gas, minimizing background noise and enhancing accuracy
- Multi-Column Configuration: Combination of PLOT Q, PLOT 5A, and PLOT U columns ensures efficient separation and high analytical precision
- Compact Integrated Design: GC system and auxiliary valve box are integrated for easy installation and operation
- High Stability: Designed for long-term continuous operation with reliable performance
Applications
- Semiconductor Manufacturing: Ensures ultra-high purity CO₂ meets strict process requirements
- Precision Electronics: Monitors high-purity gases used in manufacturing to maintain product quality
- Research Laboratories: Provides accurate analysis for high-purity gas research and development
- Advanced Industrial Applications: Suitable for aerospace, fine chemical industries, and other fields requiring strict gas purity control
| Table 1 Chromatographic Conditions | |
| Parameter | Value |
| Carrier Gas (He) | 0.4 MPa |
| Column Flow Rate | 10 ml/min |
| Auxiliary Oven Temperature | 80 °C |
| Column Oven Temperature | 50 °C |
| PDHID Detector Temperature | 200 °C |
| Sample Loop Volume | 0.1 ml |
| Table 2 Valve Switching Status and Events | |||
| Time (min) | Valve No. | Status | Function |
| 0.01 | V1 | ON | Sample passes through loop into PLOT Q pre-column; H₂, O₂+Ar, N₂, CH₄, CO quickly enter PLOT 5A analytical column |
| 1.5 | V1 | OFF | Components after CO₂ are backflushed and vented via PLOT Q pre-column |
| Table 3 Standard Gas Analysis Results | ||
| Cylinder No. | Component | Concentration (μl/l) |
| 9506159# | H₂ | 1.98 |
| 9506159# | O₂ | 4.95 |
| 9506159# | N₂ | 5.84 |
| 9506159# | CH₄ | 2.1 |
| 9506159# | CO | 1.98 |
| 9506159# | CO₂ | Balance |
